Multilevel Nanoimprint Lithography for Plasmonic Pixels Printing

MFS Shahidan; J Song; TD James; A Roberts

Conference Proceedings

Multilevel Nanoimprint Lithography for Plasmonic Pixels Printing

MFS Shahidan, J Song, TD James, A Roberts

2020 Conference on Lasers and Electro Optics Pacific Rim CLEO PR 2020 Proceedings | Published : 2020

DOI: 10.1364/CLEOPR.2020.C2E_3

Abstract

We demonstrate printing of multilevel (3-dimensional) plasmonic pixel using UV-assisted nanoimprint lithography (NIL) with a simple 2-dimensional binary (two-step) mold in a single print by harnessing nanofluidics of the polymer resist through strategic mold design.

University of Melbourne Researchers

Timothy James Author

Ann Roberts Author

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Grants

Awarded by Australian Research Council

Funding Acknowledgements

This research was supported by the Australian Research Council through LP160100054. This work was performed in part at Melbourne Centre for Nanofabrication (MCN) in the Victorian Node of the Australian National Fabrication Facility (ANFF). Part of this work was also performed at Advanced Technologies Centre (ATC) in Swinburne University of Technology. We also thank Professor Paul Mulvaney and Dr Timothy J. Davis for useful discussions,

Keywords

Engineering, Electrical & Electronic

Technology